电子超纯水工作原理
Working principle of electronic ultra pure water
电子工业用超纯水概述
An overview of ultra pure water used in the electronic industry
半导体、集成电路芯片及封装、液晶显示、高精度线路板、光电器件、各种电子器件、微电子工业、大规模、超大规模集成电路需用大量的高纯水、超纯水清洗半成品、成品。集成电路的集成度越高，对水质的要求也越高。目前我国电子工业部把电子级水质技术分为五个行业标准，分别为18MΩ.cm、15MΩ.cm、10MΩ.cm、2MΩ.cm、0.5MΩ.cm，以区分不同水质。
Semiconductor, integrated circuit chip and packaging, LCD display, high precision circuit board, photoelectric device, all kinds of electronic devices, microelectronics industry, large scale, ultra large scale integrated circuit need a lot of high pure water and ultra pure water to clean semi-finished products and finished products. The higher the integration of integrated circuits, the higher the requirement for water quality. At present, the Electronic Industry Department of China has divided the electronic grade water quality technology into five industrial standards, which are 18M Omega.Cm, 15M Omega.Cm, 10M Omega.Cm, 2M Omega.Cm and 0.5M Omega.Cm to distinguish different water quality.
用两级反渗透制取
Making use of two stage reverse osmosis
电子工业超纯水处理设备 采用两级反渗透主机加EDI
The electronic industry ultra pure water treatment equipment adopts two level reverse osmosis mainframe plus EDI.
制取电子工业超纯水处理设备
Production of ultra pure water treatment equipment in electronic industry
制备电子工业用超纯水的工艺流程
Process process for the preparation of ultra pure water for electronic industry
电子行业制备超水的工艺大致分成以下几种：
The process of preparing ultra water in the electronics industry can be roughly divided into the following:
1、采用离子交换树脂制备超纯水的传统水处理方式，其基本工艺流程为：原水→沙炭过滤器→精密过滤器→原水箱→阳床→阴床→混床（复床）→纯水箱→纯水泵→后置精密过滤器→用水点
1. The traditional water treatment method for the preparation of ultra pure water by ion exchange resin, its basic process flow is: raw water, sand carbon filter, precision filter, original water tank, Yang bed, Yin bed, mixed bed (compound bed), pure water tank, pure water pump, post precision filter and water use point.
2、采用反渗透水处理设备与离子交换设备进行组合的方式，其基本工艺流程为：原水→沙炭过滤器→精密过滤器→原水箱→反渗透设备→混床（复床）→纯水箱→纯水泵→后置精密过滤器→用水点
2. The basic process flow of reverse osmosis water treatment equipment and ion exchange equipment is as follows: raw water, sand carbon filter, precision filter, original water tank, reverse osmosis equipment, mixed bed (compound bed), pure water tank, pure water pump, post precision filter and water point.
3、采用反渗透水处理设备与电去离子（EDI）设备进行搭配的的方式，这是一种制取超纯水的最新工艺，也是一种环保，经济，发展潜力巨大的超纯水制备工艺，其基本工艺流程为：原水→沙炭过滤器→精密过滤器→原水箱→反渗透设备→电去离子（EDI）→纯水箱→纯水泵→后置精密过滤器→用水点
3. The combination of reverse osmosis water treatment equipment and electric deionization (EDI) equipment is a new process for making ultra pure water. It is also a kind of ultra pure water preparation process with environmental protection, economy and great potential for development. The basic process flow is as follows: raw water, sand filter, precision filter, original water tank and reverse process. Infiltration equipment, electric deionization (EDI), pure water tank, pure water pump, post precision filter, water point.
三种制备电子工业用超纯水的工艺比较
Comparison of three processes for preparing ultra pure water for electronic industry
目前制备电子工业用超纯水的工艺基本上是以上三种，其余的工艺流程大都是在以上三种基本工艺流程的基础上进行不同组合搭配衍生而来。现将他们的优缺点分别列于下面：
At present, the process of preparing ultra pure water for the electronic industry is basically the above three. The rest of the process flow is derived from the combination of the three basic process processes. Their advantages and disadvantages are listed below.
1、第一种采用离子交换树脂其优点在于初投资少，占用的地方少，但缺点就是需要经常进行离子再生，耗费大量酸碱，而且对环境有一定的破坏。
1, the advantage of the first kind of ion exchange resin is that the initial investment is less and the place is less, but the disadvantage is that the ion regeneration is often needed, a lot of acid and alkali is consumed, and the environment is destroyed.
2、第二种采用反渗透作为预处理再配上离子交换设备，其特点为初投次比采用离子交换树脂方式要高，但离子设备再生周期相对要长，耗费的酸碱比单纯采用离子树脂的方式要少很多。但对环境还是有一定的破坏性。
The 2 and second kinds of reverse osmosis are used as preconditioning and ion exchange equipment. The characteristics are that the secondary ratio is higher than the ion exchange resin, but the regeneration cycle of the ion equipment is relatively long, and the consumption of acid and alkali is much less than that of the ion resin. But it has a certain damage to the environment.
3、第三种采用反渗透作预处理再配上电去离子（EDI）装置，这是目前制取超纯水最经济，最环保用来制取超纯水的工艺，不需要用酸碱进行再生便可连续制取超纯水，对环境没什么破坏性。其缺点在于初投资相对以上两种方式过于昂贵。
3, third kinds of reverse osmosis preconditioning and electrical deionization (EDI) device, which is the most economical and the most environmentally friendly technology to make ultra pure water. It does not need to use acid and alkali to make the regeneration of ultra pure water, no damage to the environment. The shortcoming is that the initial investment is more expensive than the above two ways.